IES designed the all-new state-of the-art H6-Occupancy Nanotechnology Clean room. Facility associated with the Center for Information Technology Research in the Interest of Society (CITRIS) at U.C. Berkeley.

IES lead the Mechanical, Electrical, and complex code compliance design. IES’ innovative design created a user friendly, safe, and function laboratory environment.

UC Berkeley CITRIS Nanotechnology Center

Client: UC Berkeley

Location: Palo Alto, California

Team (Partner) 
Architect:  Smith Group  

Project Duration 2006-2009  

Project Valuation >$100,000,000

Project Details

  • Clean Rooms: 17,000 sq. ft. total with integrated class 100 to class 1000 Clean rooms
  • Central Utility Plant: 8,000 sq. ft. central utility plant with, hazardous gas abatement; central PCW, DI Water, CDA, HVAC; bulk Silane distribution, as well as specialty and process gases
  • Integrated H2/H7 Hazardous Occupancy which includes areas for bulk storage and dispensing of toxic, flammable, and pyrophoric, chemicals.

IES Solutions

  • Innovative solutions to allow a Semiconductor facility to be constructed within the confines of an education institution.
  • Implemented complex hazardous materials storage and handling concepts in H-Occupancy design and chemical transport.
  • Designed the HazMat monitoring and controls system for chemical delivery and toxic gas distribution systems.